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Semiconductor Industry
In the semiconductor industry, chemical pumps, valves, and piping systems are essential for safely handling ultrapure and highly corrosive chemicals used in etching, cleaning, plating, and wafer fabrication processes. High precision, contamination-free operation, and chemical resistance are critical for maintaining product quality and process reliability.
1. Ultrapure Chemical Transfer Chemical pumps, including magnetic drive pumps, diaphragm pumps, and centrifugal pumps, are used to transfer acids, bases, and solvents such as hydrochloric acid, sulfuric acid, nitric acid, and hydrogen peroxide. Piping made of PVDF, PTFE, or PFA ensures zero contamination and maintains fluid purity throughout the process.
2. Etching and Plating Processes Corrosion-resistant valves and lined pumps control the precise flow of chemicals for etching, cleaning, and plating semiconductor wafers. Accurate dosing and leak-free operation are crucial to prevent defects and ensure high yield.
3. Chemical Dosing and pH Control Pumps and valves deliver precise amounts of acids, bases, and neutralizing agents for process control, rinse solutions, and chemical preparation. Lined piping ensures safe handling of aggressive chemicals while maintaining consistent flow rates.
4. Wastewater and Effluent Management Chemical pumps and corrosion-resistant piping manage spent chemicals, rinse water, and process effluents. Teflon or PVDF-lined systems prevent leaks and chemical degradation, ensuring environmental compliance and workplace safety.
5. Cleanroom Compatibility All chemical handling equipment, including pumps, valves, and piping, is designed for cleanroom use. Smooth surfaces, non-metallic wetted parts, and seal-less designs prevent particle generation and contamination in sensitive semiconductor processes.
6. Safety and Reliability Using lined chemical pumps, corrosion-resistant valves, and high-purity piping reduces the risk of leaks, equipment corrosion, and chemical exposure. These systems ensure continuous, safe, and reliable operation in critical semiconductor manufacturing environments.
In summary, chemical pumps, valves, and piping in the semiconductor industry provide high-purity, corrosion-resistant, and precise chemical handling, supporting safe operations, product quality, and process reliability in wafer fabrication and related processes.